| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive device which can easily connect a raw material container and a vaporization supply device, without damaging airtight property or safety at exchanging a CVD raw material in semiconductor manufacturing. SOLUTION: An installation device has an installation stand of a raw material container, a fine adjusting mechanism which can incline the installation stand in the range of within 5.0 degrees, with respect to the horizontal direction and a jack mechanism for elevating and lowering the installation stand and the fine adjusting mechanism in a vertical direction.
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