| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing pad where the optical detection of the end of polishing is possible and besides the equality of polishing is favorable, and a polishing end detection method using it, and a polisher equipped with it. SOLUTION: In a polishing pad used for a chemical/mechanical polisher, the polishing layer of that polishing pad has a polishing region which has bubbles and a light transmissive region which has bubbles, and besides relation between the number (n1) of bubbles extending in the vertical direction of the polishing region and the number (n2) of bubbles existing in the vertical direction of the light transmissive region is such that n1>n2>0. |
