RAY CONVERGENCE DIRECTION REGULATOR AND RAY CONVERGENCE DIRECTION REGULATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a ray convergence direction regulator and ray convergence direction regulation method capable of exactly converting and aligning rays to a small target with a relatively simple structure. SOLUTION: The ray convergence direction regulator 10 includes a lens 20 put between two parallel windows 30 and 40. The first window 30 on a light incident side is a direction determining window and determines the direction of the rays passing the lens by directing the same toward the target. The second window 40 is a parallel moving window and corrects the alignment error of the lens by moving the convergent spot on the target.