摘要 |
PROBLEM TO BE SOLVED: To provide a scanning-type probe microscope for measuring the interaction that operates among the surface shape of a sample, a probe, and a sample and physical quantity in a three-dimensional space on the sample surface and the distribution of a field. SOLUTION: By changing the interval between a probe 12 and a sample 14 periodically, a change for the distance of interaction between the physical or chemical probe 12 and the sample, and a signal for reflecting the physical or chemical property on the surface of the sample are sampled and at the same time, the sample surface is scanned, thus simultaneously measuring the surface shape of the sample 14 and also, for example, distribution in the three- dimensional space of a magnetic field and also performing measurement near the pole of the sample surface.
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