| 摘要 |
PROBLEM TO BE SOLVED: To detect disconnection, short-circuit, missing and thickening as well with respect to faults of electrode pattern, and intend to prevent overlooking small faults and shorten time for processing. SOLUTION: Heat is given to pattern of the formed electrode 12 with power supply means 15 or temperature keeping means, and faults of the electrode pattern is inspected by detecting emission rate distribution of the electrode at that time. With respect to fault of the electrode pattern, detection is possible for disconnection, short-circuit, missing and thickening as well, and it becomes also possible to identify the location. In addition, more accurate detection becomes possible by taking measures to improve contrast of the electrode pattern image.
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