| 摘要 |
<p>PROBLEM TO BE SOLVED: To relax an abrupt impact or vibration received by a stage at the initial stage of deceleration in a stage device provided with an accelerating and decelerating mechanism for accelerating and decelerating a stage by utilizing elastic forces. SOLUTION: A reticle 1 is mounted on a reticle stage 2, and the reticle stage 2 is driven by a linear motor constituted by a needle 3 and stator 4 on a track. A stage accelerating and decelerating mechanism 6 for accelerating and decelerating the stage 2 by utilizing elastic forces of a spring 9 is provided at both ends of the track. A buffer composed of sub-springs 12, 13 having spring constants lower than that of the spring 9 of the stage accelerating and decelerating mechanism 6 is attached to the spring 9 in series. This buffer relaxes the impact, vibration or the like due to an abrupt change in forces from the spring received by the stage 2 in the initial stage of deceleration. Reticle displacement due to impact, vibration or the like can also be prevented. Synchronization accuracy and alignment accuracy of an aligner, which are important in scanning exposure, are maintained at a high level.</p> |
