| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck device and its manufacturing method, which is used even in an environment at high temperature, without deflection or peeling even under an environment with temperature change. SOLUTION: An electrostatic chuck of ceramics and a base stage of composite material of metal-ceramics for fixing the electrostatic chuck are provided. Here, the electrostatic chuck is jointed to the base stage with a solder consisting of aluminum alloy containing Mg. Related to a method for fixing the electrostatic chuck to the base stage, a solder consisting of aluminum alloy containing Mg is inserted between the electrostatic chuck and the base stage, which is thermally processed in nitrogen for jointing.</p> |
