TEG(TEST ELEMENT GROUP) PATTERN FOR EVALUATING PLASMA DAMAGE

摘要

PROBLEM TO BE SOLVED: To obtain a TEG(test element group) pattern for evaluating plasma damage which can eliminate the defective blowing out of all fuses and, at the same time, can make all gates to be able to be measured under the same condition without giving any damage to the gates. SOLUTION: A TEG pattern for evaluating plasma damage is constituted in such a way that fuses have equal structures and pads used at the time of blowing out the fuses and pads used at the time of measuring the withstand voltages of gates are individually provided so that no voltage may be impressed upon the pads connected to the gates when the fuses are blown out.