发明名称 |
Röntgenstrahlenmaskenträger |
摘要 |
an X-ray mask support comprises a support frame and a support film, wherein both of the support frame and the support film have a thermal expansion coefficient of not more than 1 x 10<-><5>K<-><1> or wherein the thermal expansion coefficient of the support film does not exceed that of the support flame or wherein both the support frame and the support film have a thermal expansion coefficient of not more than 1 x 10<-><5>K<-><1> and the support film has a surface roughness at least on the mask surface, of not more than 10 nm r.m.s. Basically a process for preparing the X-ray support film comprises the steps of forming a film on a substrate and sintering the film. |
申请公布号 |
DE3856449(T2) |
申请公布日期 |
2001.04.19 |
申请号 |
DE19883856449T |
申请日期 |
1988.09.30 |
申请人 |
CANON K.K., TOKIO/TOKYO |
发明人 |
KUSHIBIKI, NOBUO;KATO, HIDEO;MIYAKE, AKIRA;FUKUDA, YASUAKI/O CANON K.K. |
分类号 |
G03F1/14;G03F1/22;G03F7/20;(IPC1-7):G03F1/14 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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