| 摘要 |
<p>The invention relates to an apparatus for infrared radiation transmission, primarily in the mid-infrared spectrum. The system comprises a mirrored ellipsoidal cavity which collects infrared radiation from a source such as a glowbar, a silicon carbide element or an infrared laser diode. The collected radiation is directed to an interferometer such as Michaelson interferometer as used in FT-IR. An output beam is directed to a fiber bundle having a symmetrical array of optical fibers including silver halide in combination with zirconium fluoride and/or silica fibers. The fiber bundle provides high broadband mid-infrared energy transmission. A system for infrared analysis of a fluid is disclosed additionally comprising a radiation directing means to direct infrared radiation through a sample to be analysed, and to a detector for determining IR radiation directed through the sample. The apparatus and system may be used for monitoring and controlling semiconductor device manufacturing processes, such as chemical vapor deposition (CVD) by focussing an infrared probe beam within a gas associated with a CVD reaction chamber.</p> |
