METHOD FOR REMOVING ORGANIC SUBSTANCE ON SUBSTRATE, DEVICE FOR REMOVING THE SAME, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURE DISPLAY, AND APPARATUS FOR MANUFACTURE THE SAME

摘要

A method for manufacture a display comprising a substrate fabricating step of forming a predetermined element pattern on a substrate and a cell fabricating step of joining the substrate to another substrate being the companion to the former substrate to fabricating a cell, wherein at least either the substrate fabricating step or the cell fabricating step includes a removing substep of removing organic substances present on the substrates by means of a supercritical or subcritical fluid. Thus, organic substances can be oxidized and removed perfectly at relatively low temperature, and therefore the factor of contamination of a device can be eliminated. Hence the industrial significance of the invention isgreat.