| 摘要 |
PROBLEM TO BE SOLVED: To provide a batch evacuation processing method for a glass panel with a chip tube that prevents breakage of the chip tube and leakage develop ment of vacuum pumping system by eliminating creep of outer air into the furnace or efflux of furnace atmosphere out of the furnace. SOLUTION: When interior of a glass panel with a chip tube is subject to evacuation processing in the batch evacuation furnace equipped with a cooling air supply tube 18 connected to an air-feed fan 19, an exhaust tube 16 for atmosphere in the furnace connected to an exhaust fan 17, and a circulating fan 8 for the furnace atmosphere, supply quantity of cooling air is controlled with regulation of opening of the second flow control damper Ve of the cooling air supply tube 18 based on the furnace temperature, during the cooling process of the glass panel with a chip tube after the evacuation process, whereas evacuation quantity of furnace atmosphere is independently controlled with regulation of opening of the first flow control damper Vd of the exhaust tube 16 for atmosphere in the furnace based on pressure in the furnace.
|
