发明名称 3D PROFILE ANALYSIS FOR SURFACE CONTOUR INSPECTION
摘要 A system for inspecting a component (104) is provided. The system includes an imaging system (204), such as a digital camera. A controller (202) is connected to the digital camera. The controller receives the digital image data of a device that is generated by the camera. The controller processes the digital image data to generate control commands. A variable grid generation system (106) is also connected to the controller. The variable grid generation system can receive commands from the controller, and can generate a grid (102) in response to the commands that matches the component and that allows the component to be inspected.
申请公布号 WO0127864(A1) 申请公布日期 2001.04.19
申请号 WO2000US28505 申请日期 2000.10.13
申请人 SEMICONDUCTOR TECHNOLOGIES & INSTRUMENTS, INC.;RAO, SREENIVAS;JUSOH, NOOR, ASHEDAH, BINTI;WEI, WONG, SOON;HOON, TAN, SEOW;KAVETI, SATISH 发明人 RAO, SREENIVAS;JUSOH, NOOR, ASHEDAH, BINTI;WEI, WONG, SOON;HOON, TAN, SEOW;KAVETI, SATISH
分类号 G06T7/00;(IPC1-7):G06K9/00 主分类号 G06T7/00
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