| 摘要 |
A substrate tester for visual inspection of the front and back of a wafer (W) includes an arm (21) suction-holding the wafer (W) by a pad-installed portion (21b). The arm (21) is moved between a substrate carry-in position and a substrate testing position by an arm driving mechanism (22). The arm (21) is a partly-notched annular flat plate, and the pad-installed portion (21b) is disposed on the surface of the arm (21) at a predetermined spacing. A pawl member (24) is disposed on the arm (21) at a predetermined spacing to prevent the wafer (W) from falling off the arm (21). When the arm (21) is moved to the substrate testing position, the pawl member (24) is moved to the substrate fall position. If the vacuum suction of the pad-installed portion (21b) is lost, the wafer (W) tends to fall, but it hits the pawl member (24) and is thereby prevented from falling.
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