METHOD OF FABRICATING AN INTEGRATED OPTICAL COMPONENT

摘要

A method of fabricating an integrated optical component on a silicon-on- insulator chip comprising a silicon layer (1) separated from a substrate (2) by an insulating layer (3), the component having a first set of features, eg a rib waveguide (5) at a first level in the silicon layer (1) adjacent the insulating layer (3) and a second set of features, eg a triangular section (6B) at a second level in the silicon layer (1) further from the insulating layer (3), the method comprising the steps of: selecting a silicon-on- insulator chip having a silicon layer (1) of sufficient thickness for the first set of features; fabricating the first set of features in the silicon layer (1) at a first level in the silicon layer; increasing the thickness of the silicon layer (1) in selected areas to form a second level of the silico n layer (1) over part of the first level; and then fabricating the second set of features at the second level in the silicon layer (1).