发明名称 |
Adhesion test unit for thin CVD substrates monitors probe wear avoids substrate damage |
摘要 |
The adhesion test unit is mounted in a transportable table and uses successive crack and Rockwell hardness tests with only one stressing of the test piece and regular checking by light microscope of the probe wear using a soft material.
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申请公布号 |
DE19950310(A1) |
申请公布日期 |
2001.04.19 |
申请号 |
DE19991050310 |
申请日期 |
1999.10.14 |
申请人 |
GFE-GESELLSCHAFT FUER FERTIGUNGSTECHNIK UND ENTWICKLUNG SCHMALKALDEN/CHEMNITZ MBH |
发明人 |
SCHUSTER, JOACHIM |
分类号 |
G01N3/42;G01N3/46;G01N19/04;(IPC1-7):G01N3/42 |
主分类号 |
G01N3/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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