| 发明名称 |
PROCESSES FOR REMOVING WATER FROM THE SURFACE OF A SUBSTRATE |
| 摘要 |
Described are processes for removing water from the surface of a substrate, wherein the compositions comprise a fluorinated solvent and a nonionic, poly-fluoroalkyl, hydroxy-substituted surfactant.
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| 申请公布号 |
WO0127235(A1) |
申请公布日期 |
2001.04.19 |
| 申请号 |
WO2000US08195 |
申请日期 |
2000.03.28 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
JARIWALA, CHETAN, P.;CHANG, HENRY, C.;HILL, DAVID, S. |
| 分类号 |
B01D12/00;C23G5/032;F26B5/00;H01L21/306;(IPC1-7):C11D7/30;C23G5/028;F26B7/00;C11D7/50;C11D1/00 |
主分类号 |
B01D12/00 |
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