SAW DEVICE

摘要

A high-efficiency, high-frequency SAW device comprising diamond is provided whose operating frequency range is hundreds of MHz to tens of GHz. The SAW element comprises a diamond layer or a substrate layer with a diamond layer, a piezoelectric ZnO layer, a comb-shaped electrode layer, and a short-circuit electrode layer. The following relation is satisfied (2 pi • H / lambda M) = 3.0 to 10.0 where H is the thickness of the ZnO layer and lambda is the wavelength of a surface acoustic wave.