| 摘要 |
PURPOSE: A method for fabricating an optical waveguide device is provided to branch an optical signal without a loss in a constant strength by forming different channel depths and using a core diffusion method. CONSTITUTION: A photoresist is applied on a substrate. A mask having channel patterns of the first channel part connected with an optical fiber and the second channel part for branching optical signals is covered on the photoresist. An exposure process is performed. The remaining photoresist excepting the photoresist of the channel part is removed from the substrate. An over-development process is performed. The photoresist is applied on the substrate, again. The mask is covered on the substrate and the exposure process is performed. The remaining part excepting first and the second channel parts is removed from the substrate. The first polymer is applied thereon. The first polymer is divided. An optical fiber is inserted into a groove of the first channel formed between the divided polymer parts of the first polymer. The second polymer is applied on the grooves of the first and the second channels. A core of the optical fiber is combined with the channel by using a core diffusion method. The first polymer is applied thereon.
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