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发明名称
Independently controllable shutters and variable area apertures for off axis illumination
摘要
申请公布号
EP0794462(B1)
申请公布日期
2001.04.18
申请号
EP19970102818
申请日期
1997.02.20
申请人
INFINEON TECHNOLOGIES AG;KABUSHIKI KAISHA TOSHIBA
发明人
POSCHENRIEDER, BERNHARD L.;SATO, TAKASHI;AZUMA, TSUKASA
分类号
G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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