| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-iron metal cleaning fluid composition suitable for cleaning such a material to be cleaned which is required for the cleanness with a high degree, as for example a magnetic disc substrate, a super precise metallic mirror, a liquid crystalline display substrate, a semiconductor substrate and so on, and besides on which surface a non-iron metal such as aluminum, copper and an alloy of these metals exists. SOLUTION: A cleaning fluid composition for cleaning a non-iron metal comprises an aqueous solution of quaternary ammonium hydroxide which is added with a quaternary ammonium salt of silicic acid or an alkyl silicate, an anticorrosive auxiliary, an alkanol amine, and a surfactant, and contains substantially none of impurities such as metallic ions and anionic ones.
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