| 摘要 |
PROBLEM TO BE SOLVED: To prevent the lowering of a printing grade by eliminating the line width difference of a pattern corresponding to a mask boundary part caused by focus shift at the time of exposure of each mask and making the difference in level of printing density gentle to make the same inconspicous in a method for producing a liquid jet recording head forming respective layers of heaters, wiring and liquid channels by exposure performed plural times using a plurality of masks. SOLUTION: Patterns 11a, 12a are respectively formed to two masks Ha1, Hb2 used for patterning a heater material and patterns 11a and non-pattern parts 11b are alternately formed to the region 1p corresponding to eight patterns of the mask Ha while patterns 12a and non-pattern parts 12b are alternately formed to the region 2p of the other mask Hb and the respective patterns of the boundary part of them are arranged in a telescopic state. Exposure is performed successively by using the masks Ha1, Hb2 to perform patterning and heater patterns 11x, 12x having no line width difference in the boundary part are formed.
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