PLASMA TREATMENT APPARATUS AND METHOD OF CHANGING WORK-RETAINER IN PLASMA TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus wherein setup change work can easily be carried out, and a work-pressing member in the plasma treatment apparatus. SOLUTION: In a method for changing a substrate-pressing member wherein a substrate-pressing unit 22 detachably attached to an inside of a lid member 10 forming a treatment chamber and capable of being brought into contact with the substrate on an electrode to press the same to the electrode and a substrate-pressing pin 24 are changed at the time of setup change, the substrate- pressing unit 22 and the substrate-pressing pin 24 constituting the pressing unit 20 are integrally attached to and removed from the lid member 10 in the state of being attached and held to a sheet of top plate 21. By this method, position adjustment work of the pressing-member can be performed in a good work performance state so that setup change work can be facilitated, and apparatus stop time for setup change work can be shortened.