发明名称 Method for forming high frequency connections to high temperature superconductor circuits and other fragile materials
摘要 A method for forming high frequency connections between a fragile chip and a substrate is described, wherein metal is selectively deposited on a surface of a chip and a surface of a substrate, and corresponding patterns of electrically conductive bumps are selectively evaporated on the surface of the chip and the surface of the substrate over the metal layers, to form a pattern of electrically conductive bumps having spongy and dendritic properties, placing the chip in aligned contact with the substrate where each electrically conductive chip bump mates with each corresponding electrically conductive substrate bump, and selectively applying heat and pressure to the chip and substrate causing each chip bump to fuse together with each corresponding substrate bump to form an electromechanical bond.
申请公布号 US6216941(B1) 申请公布日期 2001.04.17
申请号 US20000478255 申请日期 2000.01.06
申请人 TRW INC. 发明人 YOKOYAMA KAREN E.;AKERLING GERSHON;SERGANT MOSHE
分类号 H01L39/02;H01L21/60;H05K1/18;(IPC1-7):B23K31/00;B23K31/02;H01L21/027;H01L21/203;H01L21/36 主分类号 H01L39/02
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