INK JET HEAD

摘要

PROBLEM TO BE SOLVED: To solve the point at issue such that a connection process of the drive electrodes of an actuator substrate and the terminal electrodes of a driver substrate becomes difficult workability in conventional wire bonding when nozzles are densified. SOLUTION: The upper surface of an actuator substrate 1 is made flush with the upper surface of a driver substrate 6 and grooves 100 continuing from the ink flow channels 7 formed in the upper surface of the actuator substrate 1 to the upper surface of the driver substrate 6 are formed and the drive electrodes 4 and outer electrodes 8 in the ink flow channels 7 and the terminal electrodes 10 on the upper surface of the driver substrate 6 are connected by connection electrodes 15. The cutting of the grooves is performed by a dicer blade and the electrodes are formed by metal vapor deposition and the unnecessary removal of electrodes is performed by using a resist as a mask before the cutting of the grooves.