发明名称 Capacitor and method for forming the same
摘要 A capacitor useful with semiconductor devices and a method for forming such a capacitor is provided. The capacitor comprises a contact formed in a layer of an insulating material of a semiconductor device; a first electrode formed on the layer of insulating material, the first electrode contacting the contact and having a nodular shape; a layer of a dielectric material formed on the first electrode; and a second electrode formed on the layer of the dielectric material. Desirably, the dielectric layer of the capacitor is formed from a high dielectric constant material. In another embodiment, the capacitor includes a layer of a barrier material positioned between the contact and the first electrode.
申请公布号 US6218259(B1) 申请公布日期 2001.04.17
申请号 US19990334417 申请日期 1999.06.16
申请人 MICRON TECHNOLOGY, INC. 发明人 AKRAM SALMAN
分类号 H01L21/02;H01L21/3213;(IPC1-7):H01L21/20 主分类号 H01L21/02
代理机构 代理人
主权项
地址