发明名称 |
METHOD OF PRODUCING A CONTACT STRUCTURE |
摘要 |
A method of producing a contact structure for achieving an electrical connection with a contact target. The contact structure includes a contactor formed on a planar surface of a substrate by a microfabrication technology. In one aspect, the production method involves a plastic molding technology. In another aspect, the production method involves a photolithography technology using a gray-tone photomask. The contactor has at least a horizontal portion formed on the substrate and a contact portion formed on one end of the horizontal portion. A spring force of the horizontal portion of the contactor provides a contact force when the contactor is pressed against the contact target. In a further aspect, the contact structure includes a recess for providing a free space for the contactor when the contactor is pressed against the contact target. |
申请公布号 |
SG80101(A1) |
申请公布日期 |
2001.04.17 |
申请号 |
SG20000003351 |
申请日期 |
2000.06.14 |
申请人 |
ADVANTEST CORPORATION |
发明人 |
KHOURY, THEODORE A.;FRAME, JAMES W. |
分类号 |
G01R1/073;G01R3/00;H01L21/66;H01L21/768;H01R11/18;H01R13/24;(IPC1-7):H01L21/283;H01L21/441 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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