发明名称 METHOD OF PRODUCING A CONTACT STRUCTURE
摘要 A method of producing a contact structure for achieving an electrical connection with a contact target. The contact structure includes a contactor formed on a planar surface of a substrate by a microfabrication technology. In one aspect, the production method involves a plastic molding technology. In another aspect, the production method involves a photolithography technology using a gray-tone photomask. The contactor has at least a horizontal portion formed on the substrate and a contact portion formed on one end of the horizontal portion. A spring force of the horizontal portion of the contactor provides a contact force when the contactor is pressed against the contact target. In a further aspect, the contact structure includes a recess for providing a free space for the contactor when the contactor is pressed against the contact target.
申请公布号 SG80101(A1) 申请公布日期 2001.04.17
申请号 SG20000003351 申请日期 2000.06.14
申请人 ADVANTEST CORPORATION 发明人 KHOURY, THEODORE A.;FRAME, JAMES W.
分类号 G01R1/073;G01R3/00;H01L21/66;H01L21/768;H01R11/18;H01R13/24;(IPC1-7):H01L21/283;H01L21/441 主分类号 G01R1/073
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