发明名称 |
PHOTOSENSITIVE RESIN, RESIST COMPOSITION USING PHOTOSENSITIVE RESIN, METHOD OF PATTERN FORMATION USING RESIST COMPOSITION, DEVICE PRODUCED BY METHOD THEREOF AND METHOD OF EXPOSURE USING RESIST HAVING PHOTOSENSITIVE RESIN |
摘要 |
PROBLEM TO BE SOLVED: To obtain a photosensitive resin excellent in solubility in solvents and dry etching resistance which allows to easily produce a highly integrated semiconductor device. SOLUTION: This photosensitive resin has at least three kinds of parts containing an alicyclic group part and a sulfonyl part in a main chain. Besides, The photosensitive resin preferably has a vinyl monomer part in the main chain and the vinyl monomer part preferably has the alicyclic group in a side chain. |
申请公布号 |
JP2001106785(A) |
申请公布日期 |
2001.04.17 |
申请号 |
JP20000229478 |
申请日期 |
2000.07.28 |
申请人 |
CANON INC |
发明人 |
MATSUDA MINORU;MAEHARA HIROSHI;SAKAI KEITA |
分类号 |
G03F7/004;C08F8/34;C08F232/00;C08G75/22;C08G75/23;C08K5/00;C08L25/18;C08L33/06;C08L45/00;C08L61/08;C08L81/06;C08L83/04;C08L97/00;C08L101/06;G03F7/039;G03F7/095;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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