发明名称 |
SILICA POWDER TRANSFERRING DIAPHRAGM PUMP AND METHOD OF MANUFACTURING MATRIX FOR OPTICAL FIBER USING THEREOF |
摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump and a method of manufacturing a matrix for optical fiber in which installation trouble caused by the deterioration of a diaphragm due to lubricant oil can be solved and non-adhesion silica collected in an exhaust gas processing installation can be successively taken out and transferred. SOLUTION: In this pump attached to an exhaust gas processing installation for separating and removing silica powder discharged to the outside of a system together with exhaust gas without being deposited on a starting core matrix when silica powder (glass fine particles) produced by flame reaction is deposited on the surface of the starting core matrix and a matrix for optical fiber is synthesized, an oil resisting film is formed on at least the surface of the driving air supply side of a diaphragm.
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申请公布号 |
JP2001107868(A) |
申请公布日期 |
2001.04.17 |
申请号 |
JP19990289209 |
申请日期 |
1999.10.12 |
申请人 |
SHIN ETSU CHEM CO LTD |
发明人 |
TERAJIMA MASAMI;UEHARA MASABUMI;TSUMURA HIROSHI |
分类号 |
C03B8/04;C03B37/014;C03B37/018;F04B43/02;(IPC1-7):F04B43/02 |
主分类号 |
C03B8/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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