发明名称 SILICA POWDER TRANSFERRING DIAPHRAGM PUMP AND METHOD OF MANUFACTURING MATRIX FOR OPTICAL FIBER USING THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a diaphragm pump and a method of manufacturing a matrix for optical fiber in which installation trouble caused by the deterioration of a diaphragm due to lubricant oil can be solved and non-adhesion silica collected in an exhaust gas processing installation can be successively taken out and transferred. SOLUTION: In this pump attached to an exhaust gas processing installation for separating and removing silica powder discharged to the outside of a system together with exhaust gas without being deposited on a starting core matrix when silica powder (glass fine particles) produced by flame reaction is deposited on the surface of the starting core matrix and a matrix for optical fiber is synthesized, an oil resisting film is formed on at least the surface of the driving air supply side of a diaphragm.
申请公布号 JP2001107868(A) 申请公布日期 2001.04.17
申请号 JP19990289209 申请日期 1999.10.12
申请人 SHIN ETSU CHEM CO LTD 发明人 TERAJIMA MASAMI;UEHARA MASABUMI;TSUMURA HIROSHI
分类号 C03B8/04;C03B37/014;C03B37/018;F04B43/02;(IPC1-7):F04B43/02 主分类号 C03B8/04
代理机构 代理人
主权项
地址