SINGLE PHASE PEROVSKITE FERROELECTRIC FILM ON PLATINUM ELECTRODE, AND METHOD OF ITS FORMATION

摘要

PURPOSE: A single phase perovskite ferroelectric film on platinum electrode, and method of its formation is provided to achieve high-quality ferroelectric film orientatively grown on a Pt electrode and a method of its formation. CONSTITUTION: The method for forming a ferroelectric film includes the steps of forming a first lower electrode layer of platinum(Pt) having a first fit crystal lattice structure in step 14; and forming a single phase Perovskite ferroelectric film which has a second crystal lattice structure practically identical with the first fit crystal lattice structure and is formed on the first lower electrode layer and hereby forming an electrode having ferroelectricity on the Pt in steps 15b and 16.