IMPROVED METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION,申请号KR1020007003247-传众专利搜索

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发明名称	IMPROVED METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION
摘要
申请公布号	KR20010030729(A)	申请公布日期	2001.04.16
申请号	KR1020007003247	申请日期	2000.03.27
申请人		发明人
分类号	C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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