发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND FABRICATION METHOD THEREOF
摘要 PURPOSE: To reduce leakage current of a capacitive element comprising an MISFET(metal insulator semiconductor field effect transistor). CONSTITUTION: A capacitive element C1 is formed utilizing the storage area of a p-channel MISFET having a gate oxide film 9B thicker than an MISFET at a logic section. A polysilicon film constituting a part of a gate electrode 10E is doped with n-type impurities so that the capacitive element C1 can operate stably even with a low power supply voltage.
申请公布号 KR20010030315(A) 申请公布日期 2001.04.16
申请号 KR20000053073 申请日期 2000.09.07
申请人 HITACHI, LTD. 发明人 NONAKA YUSUKE;SUZUKI KAZUHISA;TAKAHASHI TOSHIRO;YANAGISAWA YASUNOBU
分类号 H01L27/04;H01L21/822;H01L21/8234;H01L21/8238;H01L21/8242;H01L21/8244;H01L27/06;H01L27/092;H01L27/108;H01L27/11;(IPC1-7):H01L27/04 主分类号 H01L27/04
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