| 摘要 |
PURPOSE: A membrane probing system is provided to increase horizontal strength so as to form a proper alignment by arranging a conductive material inside a pressing part, eliminating an excessive part from a dielectric layer upper face, arranging a flat plane over the whole and eliminating a base board after patterning a track on the dielectric layer and the conductive material. CONSTITUTION: A polyimide layer(220) and a base board(200) are plated with a conductive material(250) by electrical plating, and the conductive material(250) such as nickel and rhodium is provided in a pressing part. Then, an excessive part of the conductive material(250) is removed from the upper face of the polyimide layer(220), and lapping is carried out for arranging a flat surface over the whole. A track(252) is patterned on the polyimide layer(220) and the conductive material(250) so as to be turned into an excellent conductor such as copper, aluminum, and gold. Subsequently, the base board(200) is removed by etching using hydrochloric acid or sulfonic acid. |
