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经营范围
发明名称
LONG LIFE HIGH TEMPERATURE PROCESS CHAMBER
摘要
申请公布号
KR20010031714(A)
申请公布日期
2001.04.16
申请号
KR1020007004777
申请日期
2000.05.02
申请人
发明人
分类号
C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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