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发明名称
SELF-CLEANING ETCH PROCESS
摘要
申请公布号
KR20010032030(A)
申请公布日期
2001.04.16
申请号
KR1020007005148
申请日期
2000.05.12
申请人
发明人
分类号
H01L21/3213
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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