| 摘要 |
PURPOSE: A method and an apparatus for preventing edge deposition are provided to prevent deposition on the edge surely , facilitate cleaning and obtain the largest useful surface area. CONSTITUTION: A removable edge ring is made of a material, having a coefficient of thermal expansion(CTE) lower than that of a substrate support(13). The edge ring and the substrate support are configured for pins(19a-19c) and slots(17a-17c) coupling. Either the edge ring or the substrate supporter, or the other of the edge ring or the substrate support comprises a plurality of hollow regions or slots, in which the pins may be inserted. The slots are at least as wide as that corresponding to the plurality of pins and extend in the direction, in which the substrate support expands and contracts during a heat cycle. Preferably, a susceptor(11a) is made of aluminum, and the edge ring is made of ceramic. A restrictor gap may be defined between a surface of the substrate support and a surface of a purge ring(15), so as to restrict the volume of a purge gas flowing to an edge of a substrate positioned on the substrate support. The purge gas delivery channel may have an exposed outlet and may be angled upwardly, to facilitate cleaning.
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