| 摘要 |
<p>PURPOSE:To accurately sense abnormal pressure of carbon dioxide and air and to generate alarm in a gas mixer by compressing the atmospheric air at least at >=0.5kgf/cm<2> gage pressure and using the compressed air wherein moisture content contained in air is removed. CONSTITUTION:Carbon dioxide is decompressed at 2kgf/cm<2> gage pressure and introduced into a filter 3 via a normally closed two-way solenoid valve 2 to remove the fine particles and introduced into a precision reduction valve 4 for low pressure. Carbon dioxide is divided into two paths at a branch point 6 and one part reaches a joining point 9 via a filter 7 and a quantitative flow rate control valve 8. The other part reaches a joining point 13 via a filter 11 and the quantitative flow rate control valve. The air compressed at >=3.5kgf/ cm<2> is cooled till room temp. in a surge tank and the fine particles of drain are removed by a filter 16 and the air reaches a nonlubricating type precision reduction valve 19 for low pressure via a two-way solenoid valve 17 and a filter 18 for removing the fine particles.</p> |
