METHOD FOR FABRICATING A CERAMIC HEATER

摘要

PROBLEM TO BE SOLVED: To provide a method for fabricating a ceramic heater that does not produce cracks caused by the shrinkage difference between a conductive paste consisting of a resistance heating material and a green sheet of a base material (core material and insulating material) when fired. SOLUTION: A ceramic heater includes a resistance heating material consisting of at least one of alumina based composition groups containing W, Re and Mo as the main ingredient and a ceramic material as the remaining. The conductive paste of the resistance heating material has a particle size of W, Re and Mo of 0.2-7 μm.