| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid leakage inspection system capable of improving detection accuracy for a liquid leakage, of facilitating cleaning and recovery, and of improving degrees of freedom for setting of an insulation substrate, as well as detecting a trace of liquid leakage from an object to be inspected with no bad effect thereon by bringing a detection electrode into contact therewith. SOLUTION: A pattern detection electrode 15 comprising mutually facing comb-shaped detection electrodes 2 of thickness 1-100μm is formed on an insulation substrate 1 made of a glass epoxy resin. Electrical contact of the pattern detection electrode 15 is controlled by an impedance adjuster 6. Liquid leakage from an object to be inspected is determined by a liquid leakage detector 7 with a signal received from the pattern detection electrode 15.
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