| 摘要 |
PROBLEM TO BE SOLVED: To provide an automatic macro-appearance inspecting device capable of performing macro appearance inspection of a wafer precisely in a short time, and can be manufactured at a low cost. SOLUTION: This inspecting device comprises a stage 12 for mounting a wafer 13, a plurality of image detecting units U11, U12,..., U44 arranged so as to cover the entire area of the wafer 13 and facing the stage 12. Each of the image detecting unit Uij (i=1-4, j=1-4) has a viewing angle corresponding to a section of the wafer 13 facing the detecting unit Uij and outputs a signal for displaying an image of the section. A processing means 2 performs appearance determination for each of the sections of the wafer 13 in parallel based on the image signal outputted from each of the image detecting unit Uij.
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