Enhanced-stability surface acoustic wave device manufacture, etches electrodes onto prepared piezoelectric substrate, followed by tuning and special surface treatment

摘要

The piezoelectric substrate (10) is prepared. A thin film electrode (11) is formed upon it. The electrode is etched, forming a linked transducer or IDT, i.e. an interdigital transducer (2). Part(s) of the substrate and/or IDT are removed to tune or trim the functional frequency of the SAW device. The surface is then altered to stabilize it.