| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer arm provided with substrate movement control members, which are easily processed, and to provide a substrate transfer device provided with the substrate transfer arm, which hardly generates deviation of its desired mounting position and is provided with the substrate movement control members having no possibility to damage the end surfaces and peripheral edge parts of a substrate, and a substrate treater. SOLUTION: A substrate transfer arm 1 is provided with a plurality of substrate movement control members 13 having a control part to control the movement to the horizontal direction of a substrate W. As the members 13 are formed in a circular form in plan view, a positioning of the members 13 at the time of a processing the members 13 and the mounting work of the members 13 are easy. Moreover, as the members 13 are formed in the circular form in the plan view, the members 13 have no square part and have no possibility to damage the end surfaces and peripheral edge parts of the substrate by interfering with the substrate W. |
