| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope and its measuring method capable of shortening the measuring time, reducing wear of a probe, and preventing degradation of measurement precision caused by the wear of the probe in measuring an object having a large area and a high aspect ratio in high resolution. SOLUTION: This scanning probe microscope comprises a probe 14 for facing a sample 13, displacement detecting mechanisms 22, 23 for detecting displacement of the probe in the vertical direction, an XY scanner 12 for scanning a wide area, a single piezoelectric element 16 for displacing the probe in the vertical direction, an approach and retreat signal supplying device 35 for outputting a voltage signal for approaching and retreating the probe to and from the surface of the sample in a sampling position, and a servo control device 30 for maintaining a reference distance between the sample and the probe based on a detection signal from the displacement detecting mechanism. The probe scans the surface while maintaining the reference distance between the probe and the sample in the sampling position, to measure a recessed and projected shape of the surface of the sample. The approach and retreat signal s01 is superimposed to a signal s0 for determining the reference distance in a servo control loop, and servo control is continued.
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