| 摘要 |
PROBLEM TO BE SOLVED: To solve the conventional problem, where the ratio of a constituent cannot be easily maintained at a specific value by excessively evaporating water being contained in treatment liquid, when the treatment liquid such as phosphoric acid aqueous solution is used at a temperature exceeding 100 deg.C under normal pressure. SOLUTION: When treatment liquid being composed of a plurality of liquid is used, pressure in a chamber is set larger than the normal pressure, while temperature is set lower than a boiling point under the normal pressure of the treatment liquid, and at the same time, is higher than the boiling point under the normal pressure of boiling point minimum liquid with the lowest boiling point under the normal pressure in the plurality of liquid for composing the treatment liquid, thus suppressing evaporation of water in the treatment liquid by setting the pressure in the chamber higher than the normal pressure.
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