SUBSTRATE TREATING METHOD AND APPARATUS THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a method of treating a substrate, preventing a treating liquid left on the substrate from reacting chemically with a following treating liquid, when the substrate is successively treated with several treating liquids. SOLUTION: A substrate 6 is successively treated with several treating liquids through a certain processing method, where a treating liquid supplied to a substrate is reduced in concentration, when a treating liquid is switched from one kind of treating liquid to another.