| 摘要 |
PURPOSE:To measure the groove depth and shape of each cell by using the position of a half-mirror which is arranged having its reflecting mirror in parallel to the surface of a sample substrate as the reference of the groove depth, expanding a specific part in the section of a divergent beam, and irradiating a photodetector with the beam. CONSTITUTION:Light beams from a multimode fiber 2 are made into a parallel beam by a lens 3 and the beam is slit into two by a beam splitter 4. One beams are reflected by a total reflecting mirror 5 and the other beams are reflected partially by a reflecting mirror 13; and the light beams transmitted through the mirror 13 are reflected by a substrate 6 to be measured which has a capacitor groove formed, further transmitted through the mirror 13 and beam splitter 13 again, and put together with the reflected beams from the mirror 5 and 13 which are transmitted through the splitter 14. When a mirror 12 is vibrated by using a triangular wave generator 12 and an electrostrictive vibrator 11, the multiplexed light beams are diverged by a concave lens 14 and part of the beam section is photodetected by a charge transfer device solid-state image pickup element 15; and signals from respective picture elements are led out by a controller 16 in order and recorded in a digital memory 10.
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