| 摘要 |
PROBLEM TO BE SOLVED: To surely and accurately detect a liquid level in a dissolution tank without being affected by a high-humidity environment in the dissolution tank, waving of the liquid level, bubbling when a liquid is dissolved, or the like. SOLUTION: Electrodes 314A-314D are shielded by a shielding member 312. Waves possible to generate when the water is first supplied, when the water used for cleaning falls, or the like are suppressed by the shielding member 312 and hard to rise inside the shielding member 312. A liquid level can be surely and accurately detected accordingly. Moreover, since bubbles are less generated when a liquid is dissolved, wrong detection due to the bubbles can be prevented. Since each of the electrodes 314A-314D is coated totally or partly, conduction when an adhering processing agent is solidified by scattering of the liquid can also be prevented.
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