发明名称 SEMICONDUCTOR MEMORY AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To offer a semiconductor device which enables an insulation film having a flat surface to be easily formed, without increasing the number of processes. SOLUTION: A capacitor 8, which is formed on a first insulation layer 5 covering MOS transistors 3 and 4, has a columnar insulation member 8a, a first capacitive electrode 8b formed on the side of the columnar insulation member 8a, a capacitive insulation film 8c formed on the first capacitive electrode 8b, and a second capacitive electrode 8d formed on a capacitive insulation film 8c. In a connection opening 6 made in the first insulation layer 5, a conductive member 7 which connects the first capacitive electrode 8b and the source/ drain 3a of the MOS transistor 3. In a peripheral circuit region B (other than a memory cell region A, in which several memory cells having the transistor 3 and capacitor 8 are included), a second insulation layer 9, which is formed at the same time as the columnar insulation member 8a of the capacitor 8 and is identical with the columnar insulation member 8a which are equal in height and material, is provided.
申请公布号 JP2001102546(A) 申请公布日期 2001.04.13
申请号 JP19990281550 申请日期 1999.10.01
申请人 NEC CORP 发明人 ABIKO HITOSHI
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/108 主分类号 H01L27/04
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