TARGET FOR GENERATING X-RAY, AND X-RAY GENERATOR

摘要

PROBLEM TO BE SOLVED: To suppress the generation of scattering particles and floating particles from a target. SOLUTION: A target 4 is constituted by a polymer film and particulate metallic particles dispersively retained in the polymer film. When an energy beam for excitation is radiated to ward the polymer film, the circumference of an irradiated position just gasifies and no scattered particles are generated. Also, a whole of each particle of the metallic particles is easily converted into plasma and generates an X-ray, and a case of a part of one particle being converted into plasma and the rest becoming scattered particles hardly ever occurs.