| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus which is capable of carrying out plasma treatment uniformly and stably, making a uniform glow discharge occur between electrodes. SOLUTION: A plasma treatment apparatus has such a function where an electric field is applied between two electrodes 1 and 2 which are arranged confronting each other, so as to make a glow discharge take place between them, plasma generating gas is supplied between the electrodes 1 and 2 to generate a plasma, and the plasma is made to act on a work to carry out surface treatment. A glassy coating layer 4 is provided, at least to the outer surface of either of the electrodes 1 and 2 through fusion welding. |
